Abstract: The study of gas flows in microchannels has received considerably more attention in the literature from a simulation perspective than an experimental. The majority of the experimental work has emphasis on the global measurements at the inlet or exit of the microchannel instead locally along it. In this paper some efforts were made to measure the pressure drop along T-shaped micro channel by using interferometry. The two side channels were served as gas entrances and they were both open to air and the channel outlet was being vacuumed during exp...
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Topics: 
Mechanics
Optics
Acoustics