@article{Kuo_2018,
title={Mechanical Loss Angle Measurement for Stressed thin Film Using Cantilever Ring-Down Method},
volume={21},
ISSN={1516-1439},
url={http://dx.doi.org/10.1590/1980-5373-mr-2017-0869},
DOI={10.1590/1980-5373-mr-2017-0869},
number={suppl 2},
journal={Materials Research},
publisher={FapUNIFESP (SciELO)},
author={Kuo,
Ling-Chi and Pan,
Huang-Wei and Huang,
Shu-Yu and Chao,
Shiuh},
year={2018},
month=may }