@article{Takahashi_1987,<br/><span class="tab"></span> title={Determination of Hydrogen Concentration in PCVD Silicon Nitride Films by Elastic Recoil Detection Analysis},<br/><span class="tab"></span> volume={26},<br/><span class="tab"></span> ISSN={1347-4065},<br/><span class="tab"></span> url={http://dx.doi.org/10.1143/jjap.26.1606},<br/><span class="tab"></span> DOI={10.1143/jjap.26.1606},<br/><span class="tab"></span> number={9R},<br/><span class="tab"></span> journal={Japanese Journal of Applied Physics},<br/><span class="tab"></span> publisher={IOP Publishing},<br/><span class="tab"></span> author={Takahashi,<br/><span class="tab"></span> Mitsutoshi and Maeda,<br/><span class="tab"></span> Masahiko and Sakakibara,<br/><span class="tab"></span> Yutaka},<br/><span class="tab"></span> year={1987},<br/><span class="tab"></span> month=sep,<br/><span class="tab"></span> pages={1606} }