@article{Lu_2013,
title={Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization},
volume={13},
ISSN={1528-7505},
url={http://dx.doi.org/10.1021/cg4010196},
DOI={10.1021/cg4010196},
number={11},
journal={Crystal Growth & Design},
publisher={American Chemical Society (ACS)},
author={Lu,
Yu and Le Paven,
Claire and Nguyen,
Hung V. and Benzerga,
Ratiba and Le Gendre,
Laurent and Rioual,
Stéphane and Tessier,
Franck and Cheviré,
François and Sharaiha,
Ala and Delaveaud,
Christophe and Castel,
Xavier},
year={2013},
month=oct,
pages={4852–4858} }