@inbook{Yoo_2019,
title={Micro/Nano Fabrication and Packaging Technologies for Bio Systems},
ISBN={9789811365492},
ISSN={1615-8326},
url={http://dx.doi.org/10.1007/978-981-13-6549-2_3},
DOI={10.1007/978-981-13-6549-2_3},
booktitle={Microtechnology and MEMS},
publisher={Springer Singapore},
author={Yoo,
Yeong Eun and Smadja,
Claire and Ammar,
Mehdi},
year={2019},
month=aug,
pages={89–137} }