Abstract: The results of studying the smoothing effect of thin Si films used as buffer layers in Be/Al multilayer mirrors optimized for operation at wavelengths longer than 17.1 nm are presented. The multilayer mirrors of the near-normal (grazing angle 88º) and sliding incidence (grazing angle 33.5º) are investigated. It is shown that the effect is observed for multilayer Be/Si/Al mirrors with periods of at least 29 nm. For normal incidence mirrors optimized for a wavelength of 17.14 nm, a record peak reflection coefficient of 62.5% was obtained with s...
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Topics: 
Optics
Optoelectronics