Abstract: Abstract The work presents a microelectromechanical system (MEMS) based magnetometer, targeting compass applications performance, which measures magnetic fields along an in-plane direction. The magnetometer is fabricated with the surface micromachining process used for consumer gyroscopes, accelerometers, and recently proposed out-of-plane magnetometers. The magnetometer is based on the Lorentz force principle, so to avoid the need for magnetic materials integration. It features an area of 282 μm×1095 μm, and it is wafer–wafer packaged at ...
(read more)
Topics: 
Nuclear magnetic resonance
Optoelectronics