Abstract: The investigation and development of micro/nano biosytem requires a sealed fluidic platform to separate, mix or control the flow of liquids and bio samples as well as a biochemical surface processing to selectively capture or repel biospecies. The first part of this chapter reviews the main techniques used for the fabrication of microchannels, reservoirs, pillars,… in various substrate materials. This includes direct machining techniques such as mechanical cutting, lithography and electroforming, as well as various replication techniques such...
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Topics: 
Nanotechnology